Bibliografie Etapa II

Bibliografie Etapa II

[1] Ness K F 1994 Multi-term solution of the Boltzmann equation for electron swarms in crossed electric and magnetic fields J. Phys. D: Appl. Phys 27 1848-61

[2] Dujko S, Raspopovic Z M and Petrovic Z Lj 2005 Monte Carlo studies of electron transport in crossed electric and magnetic fields in CF4 J. Phys. D: Appl. Phys. 38 2952–66

[3] Dujko S, White R D, Ness K F, Petrovic Z Lj and Robson R E 2006 Non-conservative electron transport in CF4 in electric and magnetic fields crossed at arbitrary angles J. Phys. D: Appl. Phys. 39 4788–98

[4] White R D, Dujko S, Robson R E, Petrovic Z Lj and McEachran L P 2010 Non-equilibrium transport of positron and electron swarms in gases and liquids Plasma Sources Sci. Technol. 19 034001

[5] Chen F F 2006 Introduction to Plasma Physics and Controlled Fusion (Second Edition) vol. 1 (Plasma Physics: Springer) p 169-72

[6] Ganciu M, Hecq M, Konstantinidis S, Dauchot J P, Touzeau M, de Poucques L and Bretagne J 2007 Pulsed magnetron sputtering deposition with pre-ionization US Patent 2007/0034498 A1

[7] Vasina P, Mesko M, de Poucques L, Bretagne J, Boisse-Laporte C and Touzeau M 2008 Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport Plasma Sources Sci. Technol. 17 035007

[8] Poolcharuansin P, Liebig B and Bradley J 2010 Plasma Parameters in a Pre-Ionized HiPIMS Discharge Operating at Low Pressure IEEE Transactions on Plasma Science 38 3007–3015

[9] Minea T M, Bretagne J, Gousset G, Magne L, Pagnon G and Touzeau M 1999 PIC-MCC simulation of a r.f. planar magnetron discharge and comparison with experiment Surf. & Coat. Technol. 116–119 558-63

[10] Minea T M, Costin C, Revel A, Lundin D and Caillault L 2013 Kinetics of plasma species in HiPIMS by particle modeling, Surf. & Coat. Technol. in press

[11] Brenning N, Lundin D, Minea T, Costin C and Vitelaru C 2013 Spokes and charged particle transport in HiPIMS magnetrons J. Phys. D: Appl. Phys. 46 084005

[12] COSTIN Claudiu, MINEA Tiberiu,  POPA Gheorghe, “Electron transport in magnetrons by a posteriori Monte Carlo simulations”, PLASMA SOURCES SCIENCE & TECHNOLOGY, in press

[13] V. Tiron, I-L. Velicu, F. Ghiorghiu and G. Popa, „The effect of the additional magnetic field and gas pressure on the sheath region of a high power impulse magnetron sputtering discharge”, Romanian Reports in Physics, (2013) in press.